Title: Thin Film Materials Technology : Sputtering of Compound Materials, 2nd Edition Author: Hideaki Adachi, Kiyotaka Wasa, Makoto Kitabatake ISBN: 0815514832 / 9780815514831 Format: Hard Cover Pages: 432 Publisher: Elsevier Year: 2004 Availability: Out of Stock
Description
Contents
An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, a key technology for nano-materials in high-speed information applications and large-area functional coating such as automotive or decorative painting of plastic parts, among other topics. In seven concise chapters, the book thoroughly reviews basic thin film technology and deposition processes, sputtering processes, structural control of compound thin films, and microfabrication by sputtering.
Chapter 1 : Thin Film Materials and Devices Chapter 2 : Thin Film Process Chapter 3 : Thin Film Growth Process Chapter 4 : Thin Film Deposition Process Chapter 5 : Characterization Chapter 6 : Sputtering Phenomena Chapter 7 : Sputtering Yield Chapter 8 : Sputtering Atoms Chapter 9 : Mechanisms of Sputtering Chapter 10 : Sputtering Systems Chapter 11 : Discharge in a Gas Chapter 12 : Sputtering System Chapter 13 : Practical Aspects of Sputtering System Chapter 14 : Deposition of Compound Thin Films Chapter 15 : Oxides Chapter 16 : Nitrides Chapter 17 : Carbides and Silicides Chapter 18 : Diamond Chapter 19 : Selenides Chapter 20 : Amorphous Thin Films Chapter 21 : Super-Lattice Structures Chapter 22 : Organic Thin Films Chapter 23 : Magnetron Sputtering Under a Strong Magentic Field Chapter 24 : Structural Control of Compound Thin Films Chapter 25 : Ferroelectric Materials and Structures Chapter 26 : Control of Structure Chapter 27 : Nanometer Structures Chapter 28 : Interfacial Control Chapter 29 : Microfabrication by Sputtering Chapter 30 : Classification by Sputtering Etching Chapter 31 : Ion Beam Sputter Etching Chapter 32 : Diode Sputter Etching Chapter 33 : Deposition into Deep Trench Structure Chapter 34 : Appendices Chapter 35 : Electric Units, Their Symbols and Conversion Factors Chapter 36 : Fundamental Physical Constants