IEC 62047-11:2013 :

IEC 62047-11:2013 : 1447658
IEC 62047-11:2013 :
Title: Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems


Pages: 38
Year:
Publisher: International Electrotechnical Commission
Availability: Within 1-2 working days
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