IEC 62047-12:2011 :

IEC 62047-12:2011 : 1447659
IEC 62047-12:2011 :
Title: Semiconductor devices - Micro-electromechanical devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures


Pages: 59
Year:
Publisher: International Electrotechnical Commission
Availability: Within 1-2 working days
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