IEC 62047-17:2015 :

IEC 62047-17:2015 : 1447663
IEC 62047-17:2015 :
Title: Semiconductor devices - Micro-electromechanical devices - Part 17: Bulge test method for measuring mechanical properties of thin films


Pages: 54
Year:
Publisher: International Electrotechnical Commission
Availability: Within 1-2 working days
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