IEC 62047-21:2014 :

IEC 62047-21:2014 : 1447668
IEC 62047-21:2014 :
Title: Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials


Pages: 26
Year:
Publisher: International Electrotechnical Commission
Availability: Within 1-2 working days
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