IEC 62047-30:2017 :

IEC 62047-30:2017 : 1447676
IEC 62047-30:2017 :
Title: Semiconductor devices - Micro-electromechanical devices - Part 30: Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film


Pages: 20
Year:
Publisher: International Electrotechnical Commission
Availability: Within 1-2 working days
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