IEC 62047-42:2022 :

IEC 62047-42:2022 : 1447688
IEC 62047-42:2022 :
Title: Semiconductor devices - Micro-electromechanical devices - Part 42: Measurement methods of electro-mechanical conversion characteristics of piezoelectric MEMS cantilever


Pages: 22
Year:
Publisher: International Electrotechnical Commission
Availability: Within 1-2 working days
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