IEC 63068-4:2022 :

IEC 63068-4:2022 : 1445354
IEC 63068-4:2022 :
Title: Semiconductor devices - Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices - Part 4: Procedure for identifying and evaluating defects using a combined method of optical inspection and photoluminescence


Pages: 25
Year:
Publisher: International Electrotechnical Commission
Availability: Within 1-2 working days
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