BS EN 62047-16:2015 :
BS EN 62047-16:2015 : 1382806
BS EN 62047-16:2015 :
Title: Semiconductor devices. Micro-electromechanical devices Test methods for determining residual stresses of MEMS films. Wafer curvature and cantilever beam deflection methods
Pages: 18
Year:
Publisher: British Standards Institution
Availability: Within 1-2 working days BSI will directly send the standards to End-User after our confirmation.
Title: Semiconductor devices. Micro-electromechanical devices Test methods for determining residual stresses of MEMS films. Wafer curvature and cantilever beam deflection methods
Pages: 18
Year:
Publisher: British Standards Institution
Availability: Within 1-2 working days BSI will directly send the standards to End-User after our confirmation.
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