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Author: Hiroyuki Hirakata, Takahiro Shimada, Takashi Sumigawa, Takayuki Kitamura ISBN: 9814241830 / 9789814241830 Year: 2011 Availability: Out of Stock
Small structures of the micro/nanometer scale, such as electronic/optic devices and MEMS/NEMS have been developed, and the size of their elements now approaches the nano/atomic scale. This book disc...
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